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Strain engineering in two-dimensional (2D) materials is a powerful but difficult to control approach to tailor material properties. Across applications, there is a need for device-compatible techniques to design strain within 2D materials. This work explores how process-induced strain engineering, commonly used by the semiconductor industry to enhance transistor performance, can be used to pattern complex strain profiles in monolayer MoS2 and 2D heterostructures. A traction–separation model is identified to predict strain profiles and extract the interfacial traction coefficient of 1.3 ± 0.7 MPa/μm and the damage initiation threshold of 16 ± 5 nm. This work demonstrates the utility to (1) spatially pattern the optical band gap with a tuning rate of 91 ± 1 meV/% strain and (2) induce interlayer heterostrain in MoS2–WSe2 heterobilayers. These results provide a CMOS-compatible approach to design complex strain patterns in 2D materials with important applications in 2D heterogeneous integration into CMOS technologies, moiré engineering, and confining quantum systems. 

We demonstrate a technique to strain two-dimensional hexagonal boron nitride (hBN) and graphene by depositing stressed thin films to encapsulate exfoliated flakes. We choose optically transparent stressors to be able to analyze strain in 2D flakes through Raman spectroscopy. Combining thickness-dependent analyses of Raman peak shifts with atomistic simulations of hBN and graphene, we can explore layer-by-layer strain transfer in these materials. hBN and graphene show strain transfer into the top four and two layers of multilayer flakes, respectively. hBN has been widely used as a protective capping layer for other 2D materials, while graphene has been used as a top gate layer in various applications. Findings of this work suggest that straining 2D heterostructures with evaporated stressed thin films through the hBN capping layer or graphene top contact is possible since strain is not limited to a single layer. 

Two-dimensional (2D) materials assembled into van der Waals (vdW) heterostructures contain unlimited combinations of mechanical, optical, and electrical properties that can be harnessed for potential device applications. Critically, these structures require control over interfacial adhesion for enabling their construction and have enough integrity to survive industrial fabrication processes upon their integration. Here, we promptly determine the adhesion quality of various exfoliated 2D materials on conventional SiO 2 /Si substrates using ultrasonic delamination threshold testing. This test allows us to quickly infer relative substrate adhesion based on the percent area of 2D flakes that survive a fixed time in an ultrasonic bath, allowing for control over process parameters that yield high or poor adhesion. We leverage this control of adhesion to optimize the vdW heterostructure assembly process, where we show that samples with high or low substrate adhesion relative to each other can be used selectively to construct high-throughput vdW stacks. Instead of tuning the adhesion of polymer stamps to 2D materials with constant 2D-substrate adhesion, we tune the 2D-substrate adhesion with constant stamp adhesion to 2D materials. The polymer stamps may be reused without any polymer melting steps, thus avoiding high temperatures (<120 °C) and allowing for high-throughput production. We show that this procedure can be used to create high-quality 2D twisted bilayer graphene on SiO 2 /Si, characterized with atomic force microscopy and Raman spectroscopic mapping, as well as low-angle twisted bilayer WSe 2 on h-BN/SiO 2 /Si, where we show direct real-space visualization of moiré reconstruction with tilt-angle dependent scanning electron microscopy. 

We report deterministic control over a moiré superlattice interference pattern in twisted bilayer graphene by implementing designable device-level heterostrain with process-induced strain engineering, a widely used technique in industrial silicon nanofabrication processes. By depositing stressed thin films onto our twisted bilayer graphene samples, heterostrain magnitude and strain directionality can be controlled by stressor film force (film stress × film thickness) and patterned stressor geometry, respectively. We examine strain and moiré interference with Raman spectroscopy through in-plane and moiré-activated phonon mode shifts. Results support systematic C 3 rotational symmetry breaking and tunable periodicity in moiré superlattices under the application of uniaxial or biaxial heterostrain. Experimental results are validated by molecular statics simulations and density functional theory based first principles calculations. This provides a method not only to tune moiré interference without additional twisting but also to allow for a systematic pathway to explore different van der Waals based moiré superlattice symmetries by deterministic design. 

Two-dimensional materials, such as transition metal dichalcogenides, have generated much interest due to their strain-sensitive electronic, optical, magnetic, superconducting, or topological properties. Harnessing control over their strain state may enable new technologies that operate by controlling these materials’ properties in devices such as straintronic transistors. Piezoelectric oxides have been proposed as one method to control such strain states on the device scale. However, there are few studies of how conformal 2D materials remain on oxide materials with respect to dynamic applications of the strain. Non-conformality may lead to non-optimal strain transfer. In this work, we explore this aspect of oxide-2D adhesion in the nanoscale switching of the substrate structural phase in thin 1T′-MoTe 2 attached to a mixed-phase thin-film BiFeO 3 (BFO), a multiferroic oxide with an electric-field induced structural phase transition that can generate mechanical strains of up to 2%. We observe that flake thickness impacts the conformality of 1T′-MoTe 2 to structural changes in BFO, but below four layers, 1T′-MoTe 2 fully conforms to the nanoscale BFO structural changes. The conformality of few-layer 1T′-MoTe 2 suggests that BFO is an excellent candidate for deterministic, nanoscale strain control for 2D materials. 

Abstract Transition metal dichalcogenides (TMDs) offer superior properties over conventional materials in many areas such as in electronic devices. In recent years, TMDs have been shown to display a phase switching mechanism under the application of external mechanical strain, making them exciting candidates for phase change transistors. Molybdenum ditelluride (MoTe2) is one such material that has been engineered as a strain-based phase change transistor. In this work, we explore various aspects of the mechanical properties of this material by a suite of computational and experimental approaches. First, we present parameterization of an interatomic potential for modeling monolayer as well as multilayered MoTe2 films. For generating the empirical potential parameter set, we fit results from density functional theory calculations using a random search algorithm known as particle swarm optimization. The potential closely predicts structural properties, elastic constants, and vibrational frequencies of MoTe2 indicating a reliable fit. Our simulated mechanical response matches earlier larger scale experimental nanoindentation results with excellent prediction of fracture points. Simulation of uniaxial tensile deformation by molecular dynamics shows the complete non-linear stress-strain response up to failure. Mechanical behavior, including failure properties, exhibits directional anisotropy due to the variation of bond alignments with crystal orientation. Furthermore, we show the deterioration of mechanical properties with increasing temperature. Finally, we present computational and experimental evidence of an extended c-axis strain transfer length in MoTe2 compared to TMDs with smaller chalcogen atoms.